DOCUMENT: TRION DRIE STANDARD OPERATING PROCEDURE Version: 9 Screen (I) Screen (II) Screen (III) Screen (IV) If you see Screen (I) Check chamber pressure is 02 mtorr, if the pressure is higher contact NanoFAB staff. If the chamber pressure is ≤ 2 mtorr press Cancel to get to screen iv) Main Menu (Load Wafer). If you see Screen (II)